JPH0720838Y2 - イオン源 - Google Patents
イオン源Info
- Publication number
- JPH0720838Y2 JPH0720838Y2 JP213290U JP213290U JPH0720838Y2 JP H0720838 Y2 JPH0720838 Y2 JP H0720838Y2 JP 213290 U JP213290 U JP 213290U JP 213290 U JP213290 U JP 213290U JP H0720838 Y2 JPH0720838 Y2 JP H0720838Y2
- Authority
- JP
- Japan
- Prior art keywords
- anode
- filament
- arc chamber
- arc
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 150000002500 ions Chemical class 0.000 claims description 14
- 238000010438 heat treatment Methods 0.000 claims description 4
- 229910052751 metal Inorganic materials 0.000 description 10
- 239000002184 metal Substances 0.000 description 10
- 238000010891 electric arc Methods 0.000 description 6
- 238000010884 ion-beam technique Methods 0.000 description 5
- 229910052782 aluminium Inorganic materials 0.000 description 3
- 230000005415 magnetization Effects 0.000 description 3
- 239000002245 particle Substances 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 229910052802 copper Inorganic materials 0.000 description 2
- 239000012212 insulator Substances 0.000 description 2
- 229910021645 metal ion Inorganic materials 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 229910052715 tantalum Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000001816 cooling Methods 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005686 electrostatic field Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000001771 impaired effect Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 230000008685 targeting Effects 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Landscapes
- Electron Sources, Ion Sources (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP213290U JPH0720838Y2 (ja) | 1990-01-11 | 1990-01-11 | イオン源 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP213290U JPH0720838Y2 (ja) | 1990-01-11 | 1990-01-11 | イオン源 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0394753U JPH0394753U (en]) | 1991-09-26 |
| JPH0720838Y2 true JPH0720838Y2 (ja) | 1995-05-15 |
Family
ID=31506012
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP213290U Expired - Lifetime JPH0720838Y2 (ja) | 1990-01-11 | 1990-01-11 | イオン源 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0720838Y2 (en]) |
-
1990
- 1990-01-11 JP JP213290U patent/JPH0720838Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0394753U (en]) | 1991-09-26 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |